EDGE INSPECTION SOLUTIONS
Maximizing Efficiency with UnitySC’s Comprehensive Edge Inspection Module
Edge inspection module can be configured as “standalone” system, or used in combination with other Inspection systems UnitySC offers.
Exploring Edge Key capabilites
UnitySC’s Edge system utilizes various angles and detectors to meticulously inspect for defects such as particles, cracks, and chips at the following areas of wafers:
- Top Edge
- Top Bevel
- APEX
- Bottom Bevel
- Bottom Edge of wafers
By detecting wafers that may break in subsequent steps early in the process flow, Edge inspection allows fabs to reduce downtime of process tools and allow higher operations savings.
