Comprehensive Metrology
& Inspection Solutions

TMAP | Tailored Metrology Automated Platform
Revolutionizing precision: Tailored, Automated, and Future-Ready for manufacturing excellence.
LightSpeed | Defect Inspector solutions
The LightSpeed is the world’s most flexible unpatterned defect inspection tool.


PSD | Metrology & Defect-Inspection combined system
Elevating wafer topography & defect control with advanced Metro-Spection technology.
WOTAN | Automated Optical Inspection (AOI) solutions
A unique AOI solution with Full-Color Optics and Simultaneous-Dual-Sided inspection capabilities.


EDGE | Inspection solutions
Maximizing efficiency with UnitySC’s comprehensive Edge inspection module.
AXIOSPECT | Semi-Automated Optical Inspection solutions
Microscope & Review Station: The ultimate inspection, review, and metrology solution with Zeiss Optics integration.
